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Hardware and software development
Научные технологии

Mercury SeriesUltra-precise coordinate measuring system

Mercury SeriesUltra-precise coordinate measuring system

Mercury SeriesUltra-precise coordinate measuring system

Typical application

  • Photo mask dimension measurement
  • Pattern dimension accuracy inspection for TFT array and CF substrates

Specification

Model Mercury Series
Max. workpiece size 2160mm x 2460 mm
Total pitch / critical dimension
measurement repeatability (3sigma)
Long dimension : 0.5m or less
Critical dimension : 0.2 m or less
Main functions Precise measurement of dimensions and coordinates of the following : Total pitch, aperture, and line width for LCD photo mask, TFT array and CF substrates



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