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Hardware and software development
Научные технологии

Polaris SeriesNon-Conatct High-Speed 3D Profiler

Polaris SeriesNon-Conatct High-Speed 3D Profiler

Polaris SeriesNon-Conatct High-Speed 3D Profiler

Typical application

Measurement of PS height, BM step and RGB surface

Features

  • Multi-spot laser scanning using confocal microscope, DMD (Digital Micro-mirror Device), and high speed camera has realized non-contact surface shape measurement
  • Less subject to disturbances such as noise and vibration
  • Automatic satistical processing/saving of data
  • Equipped with pattern recognition function and AF function
  • Applicable to various sized LCDs, from small-and medium to large, PDP and OLED

Measurement Specifications (Height)

Measurement time Approx. 1.0sec/point (for whole FOV)
Measurement repeatabiligy 3=30nm or less (objective lens x50, 2 m step)
Measurement resolution 1nm or more
Measurement range(height) 10m or higher (PS measurement)
Measurement FOV Approx. 135 X 130 m or larger (PS measurement)

Applicable Work Size

  • All sizes of glass substrates (10th generation glass substrates included)


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Projects

Marion Small YAG Laser
Internal circulation-type water cooling system Nd:YAG laser
High-repetition oscillation 20Hz
High-power oscillation
Multiple wavelength oscillation with the wavelength conversion unit    1064nm 532nm 355nm 266nm
Callisto Laser Processing Unit
High-speed repeat laser oscillation 30Hz 60Hz
Multi-wavelength oscillation 1064nm, 532nm, 355nm, 266nm
High-power, large area laser processing
User-friendly color LCD touch panel
URANUS Contrast Auto Focus
Unique technology for edge enhancement operation
-Configuration of the optimum numbers of AFV samples is possible, realizing high-speed focusing which reduces the time for focus completion to one third of that for conventional one.
-Employed with the unique logic, this equipment is capable of acquiring the optimum AFV peak, successfully increasing focus reproducibility by ore than three times than the conventional one.
Polaris SeriesNon-Conatct High-Speed 3D Profiler
Measurement of PS height, BM step and RGB surface